Simple and inexpensive time-of-flight charge-to-mass analyzer for ion beam source characterization

被引:66
作者
Gushenets, V. I.
Nikolaev, A. G.
Oks, E. M.
Vintizenko, L. G.
Yushkov, G. Yu.
Oztarhan, A.
Brown, I. G.
机构
[1] Russian Acad Sci, Inst High Current Elect, Tomsk 634055, Russia
[2] Ege Univ, TR-35100 Izmir, Turkey
[3] Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA
关键词
D O I
10.1063/1.2206778
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We describe the design, electronics, and test results of a simple and low-cost time-of-flight ion charge-to-mass analyzer that is suitable for ion source characterization. The method selects a short-time sample of the beam whose charge-to-mass composition is then separated according to ion velocity and detected by a remote Faraday cup. The analyzer is a detachable device that has been used for rapid analysis of charge-to-mass composition of ion beams accelerated by voltages of up to about 100 kV.
引用
收藏
页数:3
相关论文
共 16 条
[1]  
Brown I.G, 2004, The Physics and Technology of Ion Sources
[2]  
Brown I G, 1989, The Physics and Technology of Ion Sources
[3]   IMPROVED TIME-OF-FLIGHT ION CHARGE STATE DIAGNOSTIC [J].
BROWN, IG ;
GALVIN, JE ;
MACGILL, RA ;
WRIGHT, RT .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (09) :1589-1592
[4]   VACUUM-ARC ION SOURCES [J].
BROWN, IG .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10) :3061-3082
[5]   VACUUM-ARC ION SOURCES FOR PARTICLE ACCELERATORS AND ION-IMPLANTATION [J].
BROWN, IG .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1993, 21 (05) :537-546
[6]  
BUGAEV AS, 2000, RUSS PHYS J, V43, P105
[7]   THE TITAN ION-SOURCE [J].
BUGAEV, SP ;
NIKOLAEV, AG ;
OKS, EM ;
SCHANIN, PM ;
YUSHKOV, GY .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10) :3119-3125
[8]  
Gabovich M. D., 1972, PHYS ENG PLASMA ION
[9]  
KAMINSKII M, 1967, ATOM ION COLLISIONS
[10]   Metal vapour vacuum arc ion implantation facility in Turkey [J].
Öztarhan, A ;
Brown, I ;
Bakkaloglu, C ;
Watt, G ;
Evans, P ;
Oks, E ;
Nikolaev, A ;
Tek, Z .
SURFACE & COATINGS TECHNOLOGY, 2005, 196 (1-3) :327-332