Calibration Method of Particle Counter for Clean Spaces

被引：0

作者：

Wang Han ^{[1
]}

Li Jie ^{[1
]}

Xing Rongxin ^{[1
]}

Zhao Zhao ^{[1
]}

机构：

[1] Chinese Elect Standardizat Inst, Beijing 100007, Peoples R China

来源：

PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON TEST AUTOMATION & INSTRUMENTATION, VOL. 3 | 2008年

关键词：

Optical particle counter; calibration; clean space;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, compared with the present calibration procedures performed by the metrology facilities and optical particle counter manufactures, the recommended calibration method of optical particle counters (OPC), which are operated on the principle of light scattering by individual particles and widely used in clean-room monitoring, air pollution control and laboratory aerosol studies is discussed. Based on referencing international standards and verified in more than several models of particle counters widely used in China, the calibration methods recommended here include inlet sample flow rate, repeatability, error of particle concentration and particle sizing accuracy.

引用

页码：1381 / 1384

页数：4

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