On the Accuracy of the Parameters Extracted From S-Parameter Measurements Taken on Differential IC Transmission Lines

被引:9
|
作者
Tiemeijer, Luuk F. [1 ]
Pijper, Ralf M. T. [1 ]
van Noort, Wibo [2 ]
机构
[1] NXP Semicond Taiwan Semicond Mfg Co, Res Ctr, NL-5656 AE Eindhoven, Netherlands
[2] Natl Semicond Corp, Portland, ME 04106 USA
关键词
Deembedding; integrated circuits; on-chip interconnect transmission lines; on-wafer microwave measurements; WAFER RF CHARACTERIZATION; PROPAGATION CONSTANT;
D O I
10.1109/TMTT.2009.2020821
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we compare the accuracy of the telegrapher's equation transmission line parameters extracted with different methods from deembedded S-parameter measurements taken on differential integrated circuit transmission lines. We present a mathematical proof that conventional "open-short" deembedding is sufficient to extract the intrinsic propagation constant gamma of the transmission line, but that at the same time, some deembedding errors will remain for the extracted characteristic impedance Z(0). We illustrate this by comparing experimental results obtained after "open-short" and "short-open" deembedding, and explain that as a result of this, using either known capacitance/known conductance or known inductance/known resistance approximations to study the remaining transmission line parameters can be attractive.
引用
收藏
页码:1581 / 1588
页数:8
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