Three-dimensional structuration of zero-shrinkage LTCC ceramics for microfluidic applications

被引：20

作者：

Malecha, Karol ^{[1
]}

Golonka, Leszek J. ^{[1
]}

机构：

[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50370 Wroclaw, Poland

来源：

MICROELECTRONICS RELIABILITY | 2009年 / 49卷 / 06期

关键词：

TEMPERATURE-COFIRED CERAMICS; FABRICATION; LAMINATION;

D O I：

10.1016/j.microrel.2009.02.020

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a simple and repeatable method for realization of microfluidic channels in zero-shrinkage LTCC Green Tape (TM) system (Heraeus (R) HL2000, Germany) is presented. This method is basing on two-step lamination process and use of sacrificial volume material (SVM). Three different fugitive materials are taken into account: high purity carbon paste, carbon tape (Thick Film Technologies, USA) and cetyl alcohol. The methods of analysis such as TGA (thermo-gravimetric analysis) and SEM (scanning electron microscope) are used to characterize this new fabrication process of microfluidic channels in zero-shrinkage LTCC ceramics. (C) 2009 Elsevier Ltd. All rights reserved.

引用

页码：585 / 591

页数：7

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