Three-dimensional structuration of zero-shrinkage LTCC ceramics for microfluidic applications

被引：20
作者：
Malecha, Karol [1 ]
Golonka, Leszek J. [1 ]
机构：
[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50370 Wroclaw, Poland
来源：
MICROELECTRONICS RELIABILITY | 2009年 / 49卷 / 06期
关键词：
TEMPERATURE-COFIRED CERAMICS; FABRICATION; LAMINATION;
D O I：
10.1016/j.microrel.2009.02.020
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a simple and repeatable method for realization of microfluidic channels in zero-shrinkage LTCC Green Tape (TM) system (Heraeus (R) HL2000, Germany) is presented. This method is basing on two-step lamination process and use of sacrificial volume material (SVM). Three different fugitive materials are taken into account: high purity carbon paste, carbon tape (Thick Film Technologies, USA) and cetyl alcohol. The methods of analysis such as TGA (thermo-gravimetric analysis) and SEM (scanning electron microscope) are used to characterize this new fabrication process of microfluidic channels in zero-shrinkage LTCC ceramics. (C) 2009 Elsevier Ltd. All rights reserved.
引用
收藏
页码：585 / 591
页数：7
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