Harnessing Anisotropic Nanoposts to Enhance Long-Range Orientation Order of Directed Self-Assembly Nanostructures via Large Cell Simulations

被引:34
|
作者
Zhang, Liangshun [1 ]
Wang, Liquan [1 ]
Lin, Jiaping [1 ]
机构
[1] E China Univ Sci & Technol, Shanghai Key Lab Adv Polymer Mat, State Key Lab Bioreactor Engn, Key Lab Ultrafine Mat,Minist Educ,Sch Mat Sci & E, Shanghai 200237, Peoples R China
来源
ACS MACRO LETTERS | 2014年 / 3卷 / 08期
基金
中国国家自然科学基金; 高等学校博士学科点专项科研基金;
关键词
BLOCK-COPOLYMER LITHOGRAPHY; TEMPLATES; PATTERNS; ARRAYS; FILMS; THIN; GRAPHOEPITAXY; BOUNDARIES; POLYMERS; DOMAINS;
D O I
10.1021/mz5003257
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Self-assembly behaviors of cylinder-forming diblock copolymers directed by an array of anisotropic nanoposts with elliptical shape are explored by large cell simulations of self-consistent field theory. The strategy using elliptical nanoposts allows us to generate long-range order cylinders with single orientation by suppressing other selections of cylinder alignment. The anisotropy of nanoposts plays a significant role in improving the tolerance of commensurability conditions between the dimensions of nanopost lattices and the period of cylinders. Moreover, the local defect structures could be regulated through varying the spacing and orientation of elliptical nanoposts. This work may provide useful guidelines for designing the topographical templates and lay the groundwork for fabricating well-ordered nanostructures of block copolymer lithography.
引用
收藏
页码:712 / 716
页数:5
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