Dark current and breakdown analysis in In(Al)GaAs/InAlAs superlattice avalanche photodiodes

被引:23
作者
Makita, K
Watanabe, I
Tsuji, M
Taguchi, K
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 6A期
关键词
superlattice avalanche photodiode; InAlGaAs/InAlAs; metal organic vapor phase epitaxy; dark current; breakdown voltage;
D O I
10.1143/JJAP.35.3440
中图分类号
O59 [应用物理学];
学科分类号
摘要
We studied and compared the reverse-bias characteristics of In(Al)GaAs/InAlAs Superlattice Avalanche Photodiodes (SL-APDs) for three types of different well structures. Dark current characteristics were drastically improved in the InAlGaAs quaternary well structure application, compared with InGaAs wells. In the InAlGaAs quaternary well SL-APDs, we observed, for the first time, a linear relation between dark current and multiplication factor. A multiplied dark current of 2.0 x 10(-4) A/cm(2) was the lowest values for the SL-APDs. We also confirmed the temperature coefficient of breakdown voltage to be about 3.4 x 10(-4) K-1. This small temperature dependence suggests a distinctive SL-APD avalanche mechanism due to the contribution of large conduction band discontinuity.
引用
收藏
页码:3440 / 3444
页数:5
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