A reusable micromechanical energy storage/quick release system with assembled elastomers

被引：8

作者：

Bergbreiter, Sarah ^{[1
]}

Mahajan, Deepa ^{[2
]}

Pister, Kristofer S. J. ^{[3
]}

机构：

[1] Univ Maryland, Dept Mech Engn, College Pk, MD 20742 USA

[2] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA

[3] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2009年 / 19卷 / 05期

关键词：

Silicones - MEMS - Energy efficiency - Plastics - Energy storage - Silicon on insulator technology;

D O I：

10.1088/0960-1317/19/5/055009

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A reusable, elastomer-based energy storage/quick release system for MEMS has been designed, built and tested. Microrubber bands have been fabricated from silicone using two different methods, laser cut and molded, and assembled into silicon microstructures fabricated in a two-mask silicon-on-insulator (SOI) process. Using silicon hooks and force gauges designed in this process, these microrubber bands have been characterized as to their energy storage potential and efficiency by stretching them with a probe tip. These tests showed recovered energy efficiencies up to 92% at strains over 200% with a maximum stored energy over 19 mu J. In addition, a fully integrated micromechanical energy storage system to both store and release energy has been demonstrated using an electrostatic inchworm motor to stretch the elastomer band and release it. Using the inchworm motor, an estimated 4.9 nJ of energy was stored in the elastomer spring and quickly released.

引用

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