Transmission electron microscopy of amorphization and phase transformation beneath indents in Si

被引：67

作者：

Saka, H ^{[1
]}

Shimatani, A

Suganuma, M

Suprijadi

机构：

[1] Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan

[2] Aichi Ind Res Inst, Kariya, Aichi 4440003, Japan

[3] Inst Technol, Dept Phys, Bandung 40132, Indonesia

来源：

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 2002年 / 82卷 / 10期

关键词：

D O I：

10.1080/01418610210134404

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The microstructure beneath indents, with three different tip shapes (spherical. Vickers and Berkovich), in Si was examined using transmission electron microscopy. The focused-ion beam technique was applied to the preparation of specimens for cross-sectional observation. Activation of dislocations, cracking, phase transformation and amorphization were observed.

引用

页码：1971 / 1981

页数：11

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