Transmission electron microscopy of amorphization and phase transformation beneath indents in Si

被引：67
作者：
Saka, H [1 ]
Shimatani, A
Suganuma, M
Suprijadi
机构：
[1] Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
[2] Aichi Ind Res Inst, Kariya, Aichi 4440003, Japan
[3] Inst Technol, Dept Phys, Bandung 40132, Indonesia
来源：
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 2002年 / 82卷 / 10期
关键词：
D O I：
10.1080/01418610210134404
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The microstructure beneath indents, with three different tip shapes (spherical. Vickers and Berkovich), in Si was examined using transmission electron microscopy. The focused-ion beam technique was applied to the preparation of specimens for cross-sectional observation. Activation of dislocations, cracking, phase transformation and amorphization were observed.
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页码：1971 / 1981
页数：11
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