[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai 200050, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[3] Chinese Acad Sci, CAS Key Lab Interfacial Phys & Technol, Shanghai Inst Appl Phys, Div Phys Biol & Bioimaging Ctr,Shanghai Synchrotr, Shanghai 201800, Peoples R China