Fabrication of Cr nanostructures with the scanning tunnelling microscope

被引：9
|
作者：
Xie, W
Dai, X
Xu, LS
Allee, DA
Spector, J
机构：
[1] LUCENT TECHNOL INC,ALLENTOWN,PA 18103
[2] CYPRESS SEMICOND CORP,SAN JOSE,CA 95134
[3] ARIZONA STATE UNIV,DEPT ELECT ENGN,TEMPE,AZ 85287
[4] ROSS TECHNOL INC,AUSTIN,TX 78735
来源：
NANOTECHNOLOGY | 1997年 / 8卷 / 02期
关键词：
D O I：
10.1088/0957-4484/8/2/007
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this work, nanometer scale electrically conducting lines and quantum structures on chromium (Cr) films have been fabricated with an ambient scanning tunnelling microscope and a subsequent CR-14 chromium etch. The line width of these structures is approximately 60 nm and the height of the lines is approximately 10 nm. In addition, experiments have been performed to determine the Cr etch rate in CR-14 etchant and the thickness of the Cr layer that could be oxidized through by the STM tunnelling current.
引用
收藏
页码：88 / 93
页数：6
相关论文
共 50 条
  • [21] Scanning tunnelling microscope fabrication of arrays of phosphorus atom qubits for a silicon quantum computer
    O'Brien, JL
    Schofield, SR
    Simmons, MY
    Clark, RG
    Dzurak, AS
    Curson, NJ
    Kane, BE
    McAlpine, NS
    Hawley, ME
    Brown, GW
    SMART MATERIALS & STRUCTURES, 2002, 11 (05): : 741 - 748
  • [22] STM a new role for the scanning tunnelling microscope
    Henini, Mohamed
    III-Vs Review, 1993, 6 (02)
  • [23] A COMPACT SCANNING TUNNELLING MICROSCOPE WITH THERMAL COMPENSATION
    ALBREKTSEN, O
    MADSEN, LL
    MYGIND, J
    MORCH, KA
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1989, 22 (01): : 39 - 42
  • [24] A HIGH-RESOLUTION SCANNING TUNNELLING MICROSCOPE
    COX, MP
    SURFACE AND INTERFACE ANALYSIS, 1988, 12 (1-12) : 59 - 60
  • [25] An ultralow-temperature scanning tunnelling microscope
    M.D. Upward
    J.W. Janssen
    L. Gurevich
    A.F. Morpurgo
    L.P. Kouwenhoven
    Applied Physics A, 2001, 72 : S253 - S256
  • [26] Visualization and nanomanipulation of molecules in the scanning tunnelling microscope
    Heckl, WM
    PIONEERING IDEAS FOR THE PHYSICAL AND CHEMICAL SCIENCES: JOSEF LOSCHMIDT'S CONTRIBUTIONS AND MODERN DEVELOPMENTS IN STRUCTURAL ORGANIC CHEMISTRY, ATOMISTICS, AND STATISTICAL MECHANICS, 1997, : 179 - 191
  • [27] An ultralow-temperature scanning tunnelling microscope
    Upward, M. D.
    Janssen, J. W.
    Gurevich, L.
    Morpurgo, A. F.
    Kouwenhoven, L. P.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 72 (Suppl 2): : S253 - S256
  • [28] Possibility of subsurface investigations by scanning tunnelling microscope
    Chorniy, V.Z.
    Adkins, C.J.
    Materials science & engineering. B, Solid-state materials for advanced technology, 1998, B51 (1-3): : 192 - 196
  • [29] Possibility of subsurface investigations by scanning tunnelling microscope
    Chorniy, VZ
    Adkins, CJ
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 51 (1-3): : 192 - 196
  • [30] Mode excitation induced by the scanning tunnelling microscope
    N. Lorente
    Applied Physics A, 2004, 78 : 799 - 806
12345