Fabrication of Cr nanostructures with the scanning tunnelling microscope

被引：9

作者：

Xie, W

Dai, X

Xu, LS

Allee, DA

Spector, J

机构：

[1] LUCENT TECHNOL INC,ALLENTOWN,PA 18103

[2] CYPRESS SEMICOND CORP,SAN JOSE,CA 95134

[3] ARIZONA STATE UNIV,DEPT ELECT ENGN,TEMPE,AZ 85287

[4] ROSS TECHNOL INC,AUSTIN,TX 78735

来源：

NANOTECHNOLOGY | 1997年 / 8卷 / 02期

关键词：

D O I：

10.1088/0957-4484/8/2/007

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this work, nanometer scale electrically conducting lines and quantum structures on chromium (Cr) films have been fabricated with an ambient scanning tunnelling microscope and a subsequent CR-14 chromium etch. The line width of these structures is approximately 60 nm and the height of the lines is approximately 10 nm. In addition, experiments have been performed to determine the Cr etch rate in CR-14 etchant and the thickness of the Cr layer that could be oxidized through by the STM tunnelling current.

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收藏

页码：88 / 93

页数：6

相关论文

共 24 条

[1] SIGNIFICANCE OF ELECTROMAGNETIC POTENTIALS IN THE QUANTUM THEORY [J].

AHARONOV, Y ;

BOHM, D .

PHYSICAL REVIEW, 1959, 115 (03) :485-491

[2] NANOMETER-SCALE HOLE FORMATION ON GRAPHITE USING A SCANNING TUNNELING MICROSCOPE [J].

ALBRECHT, TR ;

DOVEK, MM ;

KIRK, MD ;

LANG, CA ;

QUATE, CF ;

SMITH, DPE .

APPLIED PHYSICS LETTERS, 1989, 55 (17) :1727-1729

[3] 7X7 RECONSTRUCTION ON SI(111) RESOLVED IN REAL SPACE [J].

BINNIG, G ;

ROHRER, H ;

GERBER, C ;

WEIBEL, E .

PHYSICAL REVIEW LETTERS, 1983, 50 (02) :120-123

[4] SCANNING TUNNELING MICROSCOPY [J].

BINNIG, G ;

ROHRER, H .

SURFACE SCIENCE, 1983, 126 (1-3) :236-244

[5] SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY [J].

BINNING, G ;

ROHRER, H ;

GERBER, C ;

WEIBEL, E .

PHYSICAL REVIEW LETTERS, 1982, 49 (01) :57-61

[6] MODIFICATION OF HYDROGEN-PASSIVATED SILICON BY A SCANNING TUNNELING MICROSCOPE OPERATING IN AIR [J].

DAGATA, JA ;

SCHNEIR, J ;

HARARY, HH ;

EVANS, CJ ;

POSTEK, MT ;

BENNETT, J .

APPLIED PHYSICS LETTERS, 1990, 56 (20) :2001-2003

[7] NANOMETER SCALE PATTERNING OF A MONOLAYER LANGMUIR-BLODGETT-FILM WITH A SCANNING TUNNELING MICROSCOPE IN AIR [J].

DAY, HC ;

ALLEE, DR ;

GEORGE, R ;

BURROWS, VA .

APPLIED PHYSICS LETTERS, 1993, 62 (14) :1629-1631

[8] SCANNING TUNNELING MICROSCOPY [J].

HANSMA, PK ;

TERSOFF, J .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (02) :R1-R23

[9]

HESS K, 1992, IEEE SPECTRUM, V44

[10] SURFACE MODIFICATION OF A-SI-H WITH A SCANNING TUNNELING MICROSCOPE OPERATED IN AIR [J].

JAHANMIR, J ;

WEST, PE ;

HSIEH, S ;

RHODIN, TN .

JOURNAL OF APPLIED PHYSICS, 1989, 65 (05) :2064-2068