Monolithic integration of Giant Magnetoresistance (GMR) devices onto standard processed CMOS dies

被引：16

作者：

-Dolores Cubells-Beltran, M. ^{[1
]}

Reig, C. ^{[1
]}

De Marcellis, A. ^{[2
]}

Figueras, E. ^{[3
]}

Yufera, A. ^{[4
]}

Zadov, B. ^{[5
]}

Paperno, E. ^{[5
]}

Cardoso, S. ^{[6
]}

Freitas, P. P. ^{[7
]}

机构：

[1] Univ Valencia, E-46100 Burjassot, Spain

[2] Univ Aquila, I-67100 Laquila, Italy

[3] CSIC, IMB CNM, Barcelona, Spain

[4] Ben Gurion Univ Negev, IL-84105 Beer Sheva, Israel

[5] Inst Super Tecn, INESC MN IN, Lisbon, Portugal

[6] Inst Super Tecn, Dept Phys, Lisbon, Portugal

[7] INESC Microsistemas & Nanotecnol, Lisbon, Portugal

来源：

MICROELECTRONICS JOURNAL | 2014年 / 45卷 / 06期

关键词：

GMR; CMOS; Monolithic integration; Integrated current sensor; CURRENT SENSORS;

D O I：

10.1016/j.mejo.2014.03.015

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Giant Magnetoresistance (GMR) based technology is nowadays the preferred option for low magnetic fields sensing in disciplines such as biotechnology or microelectronics. Their compatibility with standard CMOS processes is currently investigated as a key point for the development of novel applications, requiring compact electronic readout. In this paper, such compatibility has been experimentally studied with two particular non-dedicated CMOS standards: 035 pm from AMS (Austria MicroSystems) and 2.5 mu m from CNM (Centre Nacional de Microelectronica, Barcelona) as representative examples. GMR test devices have been designed and fabricated onto processed chips from both technologies. In order to evaluate so obtained devices, an extended characterization has been carried out including DC magnetic measurements and noise analysis. Moreover, a 2D-FEM (Finite Element Method) model, including the dependence of the GMR device resistance with the magnetic field, has been also developed and simulated. Its potential use as electric current sensors at the integrated circuit level has also been demonstrated. (C) 2014 Elsevier Ltd. All rights reserved.

引用

页码：702 / 707

页数：6

共 14 条

[1]

Brown J.L., 1996, P IEEE 39 MIDW S CIR

[2] GMR-Based Sensors Arrays for Biomagnetic Source Imaging Applications [J].