Low dielectric constant borophosphosilicate glass-ceramics: Synthesis and properties

One system of borophosphosilicate (BPS) glass-ceramics has been synthesized by sol-gel process and solid-mixed process below 950 degreesC in air. Through XRD and SEM analysis, the similarities and differences of the BPS glass-ceramics derived by the two methods in structures and the crystallizing process was studied too. It is substantiated that SiO2 glass phase wraps up BPO4 crystalline grains. Between 400degreesC and 900 degreesC, liquefaction and crystallization concur at the same time to keep the chip in shape. The typical dielectric properties of the sintered glass-ceramics show that the sintered glass-ceramics possess dielectric constant less than 5 and dielectric loss factor less than 3 x 10(-3) (1 MHz).