Temperature Effects on the Wind Direction Measurement of 2D Solid Thermal Wind Sensors

被引:10
作者
Chen, Bei [1 ]
Zhu, Yan-Qing [1 ]
Yi, Zhenxiang [1 ]
Qin, Ming [1 ]
Huang, Qing-An [1 ]
机构
[1] Southeast Univ, Key Lab MEMS, Minist Educ, Nanjing 210096, Jiangsu, Peoples R China
关键词
thermal wind sensors; wind direction; temperature effect; FLOW-SENSOR; COMPENSATION; DRIFT;
D O I
10.3390/s151229771
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
For a two-dimensional solid silicon thermal wind sensor with symmetrical structure, the wind speed and direction information can be derived from the output voltages in two orthogonal directions, i.e., the north-south and east-west. However, the output voltages in these two directions will vary linearly with the ambient temperature. Therefore, in this paper, a temperature model to study the temperature effect on the wind direction measurement has been developed. A theoretical analysis has been presented first, and then Finite Element Method (FEM) simulations have been performed. It is found that due to symmetrical structure of the thermal wind sensor, the temperature effects on the output signals in the north-south and east-west directions are highly similar. As a result, the wind direction measurement of the thermal wind sensor is approximately independent of the ambient temperature. The experimental results fit the theoretical analysis and simulation results very well.
引用
收藏
页码:29871 / 29881
页数:11
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