Diamond Deep-UV position sensitive detectors

被引：1

作者：

Conte, G. ^{[1
]}

Mazzeo, G. ^{[1
]}

Salvatori, S. ^{[1
]}

机构：

[1] Univ Rome, Dept Elect Engn, Via Vasca Navale 84, I-00146 Rome, Italy

来源：

OPTICAL SENSING II | 2006年 / 6189卷

关键词：

polycrystalline diamond; UV detectors; position sensitive; lumped parameters; finite element analysis;

D O I：

10.1117/12.663843

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The feasibility of diamond position sensitive detectors for deep UV light monitoring is reported. Based on voltage-division principle, a very simple one-dimensional photosensitive structures have been developed exploiting the strong variation of polycrystalline diamond conductivity under UV-Iight irradiation and dark conditions. Lumped and finite elements analysis have been used to compare the theoretical expectations with the experimental results obtained under excimer laser illumination. A complete characterization of such a ID position sensitive device has been performed in terms of the beam intensity insensitivity (over three orders of magnitude); the output signal dependence on the beam width; and the contact structure and its resistance influence on the device performances.

引用

页数：12

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