Diamond Deep-UV position sensitive detectors

被引:1
|
作者
Conte, G. [1 ]
Mazzeo, G. [1 ]
Salvatori, S. [1 ]
机构
[1] Univ Rome, Dept Elect Engn, Via Vasca Navale 84, I-00146 Rome, Italy
来源
OPTICAL SENSING II | 2006年 / 6189卷
关键词
polycrystalline diamond; UV detectors; position sensitive; lumped parameters; finite element analysis;
D O I
10.1117/12.663843
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The feasibility of diamond position sensitive detectors for deep UV light monitoring is reported. Based on voltage-division principle, a very simple one-dimensional photosensitive structures have been developed exploiting the strong variation of polycrystalline diamond conductivity under UV-Iight irradiation and dark conditions. Lumped and finite elements analysis have been used to compare the theoretical expectations with the experimental results obtained under excimer laser illumination. A complete characterization of such a ID position sensitive device has been performed in terms of the beam intensity insensitivity (over three orders of magnitude); the output signal dependence on the beam width; and the contact structure and its resistance influence on the device performances.
引用
收藏
页数:12
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