An improved dynamic model of tuning fork probe for scanning probe microscopy

被引：6

作者：

Ng, B. P. ^{[1
,2
]}

Zhang, Y. ^{[1
]}

Kok, S. W. ^{[1
]}

Soh, Y. C. ^{[2
]}

机构：

[1] Singapore Inst Mfg Technol, Singapore 638075, Singapore

[2] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

JOURNAL OF MICROSCOPY | 2009年 / 234卷 / 02期

关键词：

Dynamic modeling; scanning probe microscopy; system identification; tuning fork probe; SENSOR;

D O I：

10.1111/j.1365-2818.2009.03160.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

This paper presents a two coupled oscillators model to describe the dynamics of a tuning fork with a probe attached. The two coupled oscillators are unbalanced only in their effective masses and the damping ratios. By applying a frequency domain system identification approach in experimental investigation of various probe attachment cases, a good accuracy of the model is demonstrated. The effectiveness of the model is further demonstrated in quantitative analysis of the noise performance and the sensitivity of force sensing with a tuning fork probe. Compared with existing models, the proposed model can more accurately characterize the dynamics of a tuning fork probe.

引用

页码：191 / 195

页数：5

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