Holographic Imaging technique for characterization of MEMS switch dynamics

被引：8

作者：

Ostasevicius, V ^{[1
]}

Palevicius, A ^{[1
]}

Daugela, A ^{[1
]}

Ragulskis, M ^{[1
]}

Palevicius, R ^{[1
]}

机构：

[1] Kaunas Univ Technol, Ctr Int Studies, Kaunas, Lithuania

来源：

SMART STRUCTURES AND MATERIALS 2004: SMART ELECTRONICS, MEMS, BIOMEMS AND NANOTECHNOLOGY | 2004年 / 5389卷

关键词：

MEMS; laser interferometry; holography; FEM;

D O I：

10.1117/12.540183

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An innovative holographic imaging technique is applied in characterization of MEMS switch non-linear dynamics. The Duffing's non-linear oscillator based phenomenological model was adopted to study MEMS switch non-linear response due to the complicated contact phenomena and corresponding boundary conditions. An experimental contact measurement result of MEMS cantilever response that matches theoretical trends is provided. Non-destructive contact measurements were performed by means of quantitative nanomechnical test instruments. Non-contact holographic characterization method yielded results comparable with phenomenological model and contact measurements. The proposed holographic characterization method consists of digitized holographic measurements enhanced by the FEW eigenvector problem solution. Two cases were analyzed for simple and perturbated sinusoidal excitations that,. correspond to the free and contact boundary conditions; respectively.

引用

页码：73 / 84

页数：12

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