Direct-imaging DOEs for high-NA multi-spot confocal microscopy

被引：3

作者：

Li, Zheng ^{[1
,2
]}

Taphanel, Miro ^{[1
,2
]}

Laengle, Thomas ^{[2
]}

Beyerer, Juergen ^{[1
,2
]}

机构：

[1] Karlsruher Inst Technol KIT, Lehrstuhl Interakt Echtzeitsyst IES, Karlsruhe, Germany

[2] Fraunhofer Inst Optron Syst Tech & Bildauswertung, Karlsruhe, Germany

来源：

TM-TECHNISCHES MESSEN | 2020年 / 87卷 / s1期

关键词：

DOE; diffractive optics; confocal microscopy; surface metrology;

D O I：

10.1515/teme-2020-0017

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Diffractive lens arrays with overlapping apertures can produce spots with high numerical apertures (NAs). Such diffractive optical elements (DOEs) can replace high-NA objectives and measure a large area with high resolution in transmission microscopes. However, in reflection microscopes for surface measurements, the axial resolution is still limited by the objectives. Direct-imaging DOEs are proposed to solve the problem. They can perform high-NA multi-spot measurement in reflection configurations in both lateral and axial directions. Experiments demonstrate a lateral non-vanishing contrast up to 1448 1p/mm and an axial response on a plane mirror with a full width at half maximum (FWHM) of 2.24 mu m.

引用

页码：S40 / S43

页数：4

共 9 条

[1] Multifunctional double-layered diffractive optical element [J].

Dai, EW ;

Zhou, CH ;

Xi, P ;

Liu, LR .

OPTICS LETTERS, 2003, 28 (17) :1513-1515

[2] High NA diffractive array illuminators and application in a multi-spot scanning microscope [J].

Hulsken, B. ;

Vossen, D. ;

Stallinga, S. .

JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 2012, 7

[3]

Kirshner H., 2011, P 12 INT C METH APPL, V1, P154

[4]

Li Z., 2019, IMEKO JOINT TC1 TC2, V11144, P254

[5]

Sommerfeld A, 1896, Mathematische Annalen, V47, P317, DOI [10.1007/BF01447273, DOI 10.1007/BF01447273]

[6]

Sommerfeld A., 2004, MATH THEORY DIFFRACT, P9

[7]

Stenau T., 2016, IMAGING SYSTEMS APPL

[8] Analysis of Signal Demodulation Circuit of Eddy Current Sensor Based on Taylor Series [J].

Yang, Lulu ;

Wang, Rongbin ;

Li, Zhe ;

Qiao, Yongming .

2019 11TH INTERNATIONAL CONFERENCE ON INTELLIGENT HUMAN-MACHINE SYSTEMS AND CYBERNETICS (IHMSC 2019), VOL 2, 2019, :181-184

[9]

Zheng G, 2016, Fourier ptychographic imaging a MATLAB tutorial

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