SEMI-AUTOMATIC TUNING OF PID GAINS FOR ATOMIC FORCE MICROSCOPES

被引：21

作者：

Abramovitch, Daniel Y. ^{[1
]}

Hoen, Storrs ^{[1
]}

Workman, Richard ^{[1
]}

机构：

[1] Agilent Labs, Nanotechnol Grp, Santa Clara, CA 95051 USA

来源：

ASIAN JOURNAL OF CONTROL | 2009年 / 11卷 / 02期

关键词：

AFM; PID; Auto-Tuning;

D O I：

10.1002/asjc.95

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The control of a typical commercial Atomic Force Microscope (AFM) is through some variant on a Proportional, Integral, Derivative (PID) controller. Typically, the gains are hand tuned so as to keep the bandwidth of the system far below the first resonant frequency of the actuator. This paper shows a straightforward method of selecting PID gains from the actuator model so as to allow considerably higher bandwidths.

引用

页码：188 / 195

页数：8

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