Anneal Effect of Er doped Zinc Oxide by Spray Pyrolysis

被引：0
|
作者：
Hsieh, Tsung-Mao [1 ]
Liu, Cheng-You [1 ]
Huang, Hsiang-Ming [1 ]
Lee, Che-Chi [1 ]
Lan, Wen-How [1 ]
Wang, Mu-Chun [2 ]
Lin, Jia-Ching [3 ]
Chang, Kuo-Jen [3 ]
Lin, Wen-Jen [3 ]
机构：
[1] Natl Univ Kaohsiung, Dept Elect Engn, Kaohsiung 81148, Taiwan
[2] Minghsin Univ Sci & Technol, Dept Elect Engn, Hsinchu 30401, Taiwan
[3] Natl Chung Shan Inst Sci & Technol, Taoyuan 32599, Taiwan
来源：
2018 7TH IEEE INTERNATIONAL SYMPOSIUM ON NEXT-GENERATION ELECTRONICS (ISNE) | 2018年
关键词：
zinc oxide; erbium; anneal; ZNO; LUMINESCENCE;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Zinc oxide thin films with and without erbium doping were prepared by spray pyrolysis with zinc chloride and erbium acetate precursors. Film thickness profile after 700 degrees C annealing process were analyzed. With the anneal time increase, rough and smooth surface were characterized for the ZnO and ZnO:Er samples respectively. The 10K photoluminescence were applied for the film characterization.
引用
收藏
页码：360 / 361
页数：2
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