Fabrication of advanced probes for atomic force microscopy using focused ion beam

被引：21
|
作者：
Ageev, O. A. [1 ]
Kolomiytsev, A. S. [1 ]
Bykov, A. V. [2 ]
Smirnov, V. A. [1 ]
Kots, I. N. [1 ]
机构：
[1] Southern Fed Univ, Rostov Na Donu 344006, Russia
[2] NT MDT Co, Moscow 124482, Russia
来源：
MICROELECTRONICS RELIABILITY | 2015年 / 55卷 / 9-10期
关键词：
Focused ion beam; Atomic force microscopy; Nanotechnology; Nanodiagnostics; Ion beam milling;
D O I：
10.1016/j.microrel.2015.06.079
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work the results of experimental studies of a fabrication of advanced probes for Atomic Force Microscopy (AFM) using Focused Ion Beam (FIB) and nanolithography are reported. Ability to restore the functionality of broken AFM probe tips is shown. The superior performance of FIB-fabricated probes by observing AFM images of the nanostructures is demonstrated. It is shown that the formation of multiprobe AFM cantilevers by FIB-induced deposition of tungsten allows creating an electrical measurement tool for nanotechnology and high-performance instrument for probe nanolithography. It is shown that the use of modified cantilevers for the diagnostics of submicron structures allows one to minimize the artefacts of AFM images, as well as to increase the accuracy of the obtained results. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码：2131 / 2134
页数：4
相关论文
共 50 条
  • [21] Focused ion beam modification of atomic force microscopy tips for near-field scanning optical microscopy
    Krogmeier, JR
    Dunn, RC
    APPLIED PHYSICS LETTERS, 2001, 79 (27) : 4494 - 4496
  • [22] Advanced atomic force microscopy probes: Wear resistant designs
    Liu, H
    Klonowski, M
    Kneeburg, D
    Dahlen, G
    Osborn, M
    Bao, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (06): : 3090 - 3093
  • [23] High contrast imaging of interphases in ternary polymer blends using focused ion beam preparation and atomic force microscopy
    Virgilio, N
    Favis, BD
    Pépin, MF
    Desjardins, P
    L'Espérance, G
    MACROMOLECULES, 2005, 38 (06) : 2368 - 2375
  • [24] Large colloidal probes for atomic force microscopy: Fabrication and calibration issues
    Chighizola, Matteo
    Puricelli, Luca
    Bellon, Ludovic
    Podesta, Alessandro
    JOURNAL OF MOLECULAR RECOGNITION, 2021, 34 (01)
  • [25] Fabrication of nanomagnetic probes via focused ion beam etching and deposition
    Khizroev, S
    Bain, JA
    Litvinov, D
    NANOTECHNOLOGY, 2002, 13 (05) : 619 - 622
  • [26] Impacts of Focused Ion Beam Processing on the Fabrication of Nanoscale Functionalized Probes
    Wang, Xiang
    Taylor, Sandra D.
    Sassi, Michel
    Xue, Sichuang
    Yang, Zhenzhong
    Liu, Jia
    Liu, Lili
    Li, Xiaoxu
    Du, Yingge
    Rosso, Kevin M.
    Zhang, Xin
    INORGANIC CHEMISTRY, 2025,
  • [27] High resolution magnetic force microscopy using focused ion beam modified tips
    Phillips, GN
    Siekman, M
    Abelmann, L
    Lodder, JC
    APPLIED PHYSICS LETTERS, 2002, 81 (05) : 865 - 867
  • [28] Investigating Degree of Blending Between Reclaimed Asphalt Pavement and Virgin Binder Using Atomic Force Microscopy and Focused Ion Beam
    Solaimanian, Mansour
    Chen, Xuan
    TRANSPORTATION RESEARCH RECORD, 2021, 2675 (11) : 554 - 564
  • [29] Advanced fabrication process for combined atomic force-scanning electrochemical microscopy (AFM-SECM) probes
    Eifert, Alexander
    Mizaikoff, Boris
    Kranz, Christine
    MICRON, 2015, 68 : 27 - 35
  • [30] Combining focused ion beam and atomic layer deposition in nanostructure fabrication
    Han, Zhongmei
    Vehkamaki, Marko
    Leskela, Markku
    Ritala, Mikko
    NANOTECHNOLOGY, 2014, 25 (11)
12345