On-machine and in-process surface metrology for precision manufacturing

被引：274

作者：

Gao, W. ^{[1
]}

Haitjema, H. ^{[2
]}

Fang, F. Z. ^{[3
,4
]}

Leach, R. K. ^{[5
]}

Cheung, C. F. ^{[6
]}

Savio, E. ^{[7
]}

Linares, J. M. ^{[8
]}

机构：

[1] Tohoku Univ, Sendai, Miyagi, Japan

[2] Katholieke Univ Leuven, Leuven, Belgium

[3] Tianjin Univ, Tianjin, Peoples R China

[4] Univ Coll Dublin, Dublin, Ireland

[5] Univ Nottingham, Nottingham, England

[6] Hong Kong Polytech Univ, Hong Kong, Peoples R China

[7] Univ Padua, Padua, Italy

[8] Aix Marseille Univ, Marseille, France

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2019年 / 68卷 / 02期

基金：

英国工程与自然科学研究理事会;

关键词：

Surface; Metrology; Manufacturing; GEOMETRIC ERROR MEASUREMENT; WHITE-LIGHT INTERFEROMETRY; OPTICAL FREEFORM SURFACES; PROFILE MEASUREMENT; TOOL WEAR; FLATNESS MEASUREMENT; MEASUREMENT SYSTEM; WORKPIECE SURFACE; SHAPE MEASUREMENT; SELF-CALIBRATION;

D O I：

10.1016/j.cirp.2019.05.005

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

On machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed. (C) 2019 CIRP. Published by Elsevier Ltd. All rights reserved.

引用

页码：843 / 866

页数：24

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