Film Over Wire (FOW) Selection for Copper Wire Application

被引:0
作者
Lee, Ming-Wei [1 ]
Lin, Yu-Ta [1 ]
Pan, Pao-Tung [1 ]
Lin, Yu-Cheng [1 ]
Lin, Chang-Chih [1 ]
机构
[1] NXP Semicond Taiwan, Dev Technol Dept, Nepz Kaohsiung 81170, Taiwan
来源
2013 8TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT) | 2013年
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High functionality integration, thinning and miniaturization of IC package dimensions, and cost benefit are the main stream in IC package development, especially in mobile application market. Stacked dies and copper wire technology are utilized to fulfill these demands. FOW (Film over wire) is an alternative material for interposer solution in stacked die package. A reliability test was performed on HAST (110 degrees C/85). The lift ball failure was happened at 288 hours, the failure mechanism was confirmed due to bond pad corrosion that IMC (intermetallic compound) was corroded by chloride under high humidity with bias (Figure 1). The concentration of chloride ion in FOW material is a main factor of failing to pass the IC reliability test. The extracted ions were analyzed by ion chromatography and Inductively Coupled Plasma Mass Spectrometry (ICP-MS) when temperature above 120 deg C chloride ion was leached. That contributed to reliability risk on Cu wire package under humidity environment. In summary, this study discloses how chloride ion attached and corroded bond pad at high temperature 110 deg C as result of ball lift. So, the way of work of FOW selection for copper wire bonding in stacked die package is the purpose of this paper. [GRAPHICS] .
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页码:306 / 309
页数:4
相关论文
共 3 条
[1]  
O'Halloran G.M., 2013, INT S TEST FAIL AN
[2]  
Rongen Rene, 2013, AEC REL WORKSH 2013
[3]  
Yamaji Yasuhiro, 2011 13 EL PACK TECH, P480