Influence of Silver as a Catalyst on the Growth of β-Ga2O3 Nanowires on GaAs

被引：7

作者：

Alhalaili, Badriyah ^{[1
]}

Mao, Howard ^{[1
]}

Dryden, Daniel M. ^{[2
,3
]}

Cansizoglu, Hilal ^{[1
]}

Bunk, Ryan James ^{[2
]}

Vidu, Ruxandra ^{[2
,4
]}

Woodall, Jerry ^{[2
]}

Islam, M. Saif ^{[2
]}

机构：

[1] Kuwait Inst Sci Res, Nanotechnol & Adv Mat Program, Kuwait 13109, Kuwait

[2] Univ Calif Davis, Elect & Comp Engn, Davis, CA 95616 USA

[3] Univ Calif Davis, Mat Sci & Engn, Davis, CA 95616 USA

[4] Univ Politeh Bucharest, Fac Mat Sci & Engn, Bucharest 060042, Romania

来源：

MATERIALS | 2020年 / 13卷 / 23期

关键词：

Ga2O3; GaAs; nanowires; oxidation; silver catalyst;

D O I：

10.3390/ma13235377

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A simple and inexpensive thermal oxidation process was performed to synthesize gallium oxide (Ga2O3) nanowires using Ag thin film as a catalyst at 800 degrees C and 1000 degrees C to understand the effect of the silver catalyst on the nanowire growth. The effect of doping and orientation of the substrates on the growth of Ga2O3 nanowires on single-crystal gallium arsenide (GaAs) wafers in atmosphere were investigated. A comprehensive study of the oxide film and nanowire growth was performed using various characterization techniques including XRD, SEM, EDS, focused ion beam (FIB), XPS and STEM. Based on the characterization results, we believe that Ag thin film produces Ag nanoparticles at high temperatures and enhances the reaction between oxygen and gallium, contributing to denser and longer Ga2O3 nanowires compared to those grown without silver catalyst. This process can be optimized for large-scale production of high-quality, dense, and long nanowires.

引用

页码：1 / 15

页数：14

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