InGaAs/InP focal plane arrays for visible light imaging

被引：7

作者：

Martin, TJ ^{[1
]}

Cohen, MJ ^{[1
]}

Dries, JC ^{[1
]}

Lange, MJ ^{[1
]}

机构：

[1] Sensors Unlimited Inc, Princeton, NJ 08550 USA

来源：

INFRARED TECHNOLOGY AND APPLICATIONS XXX | 2004年 / 5406卷

关键词：

focal plane array; InGaAs; visible imaging; SWIR; near infrared;

D O I：

10.1117/12.542523

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on recent results in using InGaAs/InP focal plane arrays for visible light imaging. We have fabricated substrate-removed backside illuminated InGaAs/InP focal plane arrays down to a 10 pm pitch with high quantum efficiency from 0.4 mum through 1.7 mum. This focal plane array can be used for visible imaging as well as imaging eye-safe lasers. Using the InGaAs/InP materials system for visible imaging applications has several advantages over silicon based CMOS or CCD imagers including inherent radiation hardness, the ability to simultaneously achieve low crosstalk (less than 1%), and bandwidths exceeding 1 GHz, as well as the ability to image out to 1.7 tun.

引用

页码：38 / 45

页数：8