Influence of Si and N additions on structure and phase stability of Ge2Sb2Te5 thin films

被引:20
|
作者
Koelpin, Helmut [1 ]
Music, Denis [1 ]
Laptyeva, Galyna [2 ]
Ghadimi, Reza [2 ]
Merget, Florian [3 ]
Richter, Silvia [2 ]
Mykhaylonka, Ruslan [1 ]
Mayer, Joachim [2 ]
Schneider, Jochen M. [1 ]
机构
[1] Rhein Westfal TH Aachen, D-52056 Aachen, Germany
[2] Rhein Westfal TH Aachen, Cent Facil Electron Microscopy, D-52074 Aachen, Germany
[3] Rhein Westfal TH Aachen, Inst Semicond Elect, D-52074 Aachen, Germany
关键词
RANDOM-ACCESS MEMORY; X-RAY-DIFFRACTION; ELECTRICAL-PROPERTIES; CRYSTAL-STRUCTURE; RESISTANCE MEASUREMENTS; CHANGE MEDIA; NITROGEN; DISK; TRANSITION; PERFORMANCE;
D O I
10.1088/0953-8984/21/43/435501
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The influence of Si and N in Ge2Sb2Te5 (space group Fm (3) over barm) on structure and phase stability thereof was studied experimentally by thin film growth and characterization as well as theoretically by ab initio calculations. It was found that Si and N most probably accumulate in the amorphous matrix embedding Ge2Sb2Te5 grains. The incorporation of Si and N in these samples causes an increase of the crystallization temperature and the formation of finer grains. N is more efficient in increasing the crystallization temperature and in reducing the grain size than Si which can be understood based on the bonding analysis. The incorporation of both Si and N in Ge2Sb2Te5 is energetically unfavourable, leading to finer grains and larger crystallization temperatures. While in the case of Si additions no significant changes in bonding are observed, N additions appear to enable the formation of strong Te-N bonds in the amorphous matrix, which are shown to be almost twice as strong as the strongest bonds in unalloyed Ge2Sb2Te5.
引用
收藏
页数:8
相关论文
共 50 条
  • [31] Crystal structure and microstructure of nitrogen-doped Ge2Sb2Te5 thin film
    Jeong, TH
    Kim, MR
    Seo, H
    Park, JW
    Yeon, C
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (5A): : 2775 - 2779
  • [32] Toward the Ultimate Limit of Phase Change in Ge2Sb2Te5
    Simpson, R. E.
    Krbal, M.
    Fons, P.
    Kolobov, A. V.
    Tominaga, J.
    Uruga, T.
    Tanida, H.
    NANO LETTERS, 2010, 10 (02) : 414 - 419
  • [33] Atomistic origins of the phase transition mechanism in Ge2Sb2Te5
    Da Silva, Juarez L. F.
    Walsh, Aron
    Wei, Su-Huai
    Lee, Hosun
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (11)
  • [34] Metastable Stacking-Polymorphism in Ge2Sb2Te5
    He, Shixiong
    Zhu, Linggang
    Zhou, Jian
    Sun, Zhimei
    INORGANIC CHEMISTRY, 2017, 56 (19) : 11990 - 11997
  • [35] Tuning the Crystallization Temperature of Amorphous Ge2Sb2Te5 by O and Si Recoil Implantation
    Carria, E.
    Mio, A. M.
    Gibilisco, S.
    Miritello, M.
    Grimaldi, M. G.
    Rimini, E.
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 14 (03) : H124 - H127
  • [36] Crystallization of sputtered-deposited and ion implanted amorphous Ge2Sb2Te5 thin films
    Rimini, E.
    De Bastiani, R.
    Carria, E.
    Grimaldi, M. G.
    Nicotra, G.
    Bongiorno, C.
    Spinella, C.
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (12)
  • [37] Effect of Sb2Se on phase change characteristics of Ge2Sb2Te5
    Wang, Miao
    Lu, Yegang
    Shen, Xiang
    Wang, Guoxiang
    Li, Jun
    Dai, Shixun
    Song, Sannian
    Song, Zhitang
    CRYSTENGCOMM, 2015, 17 (26): : 4871 - 4876
  • [38] Phase transition behaviors of Mo- and nitrogen-doped Ge2Sb2Te5 thin films investigated by in situ electrical measurements
    Huang, Yu-Jen
    Chen, Yen-Chou
    Hsieh, Tsung-Eong
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (03)
  • [39] Electrical and Mechanical Properties Enhancement in Superlattice-Like GaSb/Ge2Sb2Te5 Phase Change Thin Films
    Yin, Qixun
    Wang, Ming
    Xu, Xiulan
    Yu, Guanghua
    Chen, Leng
    ADVANCED MATERIALS INTERFACES, 2021, 8 (14)
  • [40] Photoinduced Crystallization of Sb2Se3 and Ge2Sb2Te5 Chalcogenide Films
    Lebedeva, Y. S.
    Smayev, M. P.
    Budagovsky, I. A.
    Fedyanina, M. E.
    Sinev, I. S.
    Kunkel, T. S.
    Romashkin, A. V.
    Smirnov, P. A.
    Sherchenkov, A. A.
    Kozyukhin, S. A.
    Lazarenko, P. I.
    JOURNAL OF SURFACE INVESTIGATION, 2023, 17 (SUPPL 1): : S339 - S348