Development of environmental scanning electron microscopy electron beam profile imaging with self-assembled monolayers and secondary ion mass spectroscopy

被引：0

作者：

Wight, S ^{[1
]}

Gillen, G ^{[1
]}

Herne, T ^{[1
]}

机构：

[1] NIST,PROC MEASUREMENTS DIV,GAITHERSBURG,MD 20899

来源：

SCANNING | 1997年 / 19卷 / 02期

关键词：

environmental scanning electron microscope; self-assembled monolayer; Monte Carlo; SAM; ESEM; backscatter;

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A method for demonstrating the scattering of the primary electron beam in the presence of a gas has been developed. A self-assembled decanethiol monolayer is damaged by primary beam electrons. The damaged portion of the monolayer is exchanged with another thiol-containing molecule by immersion in solution. The resulting film is imaged using a secondary ion mass spectrometer. Three-dimensional reconstruction of the data yields a representation of scattered electrons in the gaseous environment of the environmental scanning electron microscope.

引用

页码：71 / 74

页数：4

共 6 条

[1]

[Anonymous], P 50 ANN M EL MICR S

[2]

BRIGHT DS, 1995, MICROBEAM ANAL, V4, P151

[3]

Danilatos G, 1990, Advances in Electronics and Electron Physics, V78, P1, DOI DOI 10.1016/S0065-2539(08)60388-1

[4]

DANILATOS GD, 1988, ADV ELECTRON EL PHYS, V71, P109

[5] PATTERNING OF SELF-ASSEMBLED ALKANETHIOL MONOLAYERS ON SILVER BY MICROFOCUS ION AND ELECTRON-BEAM BOMBARDMENT [J].

GILLEN, G ;

WIGHT, S ;

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APPLIED PHYSICS LETTERS, 1994, 65 (05) :534-536

[6] STATIC SECONDARY ION MASS-SPECTROMETRY OF SELF-ASSEMBLED ALKANETHIOL MONOLAYERS ON GOLD [J].

TARLOV, MJ ;

NEWMAN, JG .

LANGMUIR, 1992, 8 (05) :1398-1405

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