Short-channel modeling of bulk accumulation MOSFETs

被引:10
作者
Murali, R
Austin, BL
Wang, LH
Meindl, JD [1 ]
机构
[1] Georgia Inst Technol, Microelect Res Ctr, Atlanta, GA 30332 USA
[2] Polytech Univ Puerto Rico, Dept Elect Engn, Hato Rey, PR 00919 USA
基金
美国国家科学基金会;
关键词
accumulation; buried channel; inversion; MOSFET; short-channel; threshold voltage;
D O I
10.1109/TED.2004.828276
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Physically based short-channel effect (SCE) models are derived for, bulk accumulation. MOSFETs. Using the proposed models, threshold voltage rolloff, subthreshold swing, and subthreshold current can be accurately calculated; this enables physical insights into device scaling, behavior, and prediction of scaling limits, The models enable optimization of accumulation MOSFETs, resulting in. small SCE, and low process sensitivity, The models are equally applicable to inversion MOSFETs, and allow easy comparison between accumulation and inversion MOSFETs. Novel application areas of accumulation MOSFETs are identified where they perform better than inversion MOSFETs (better on-current and lower. SCE for a given off-current). With mid-band metal gate, accumulation MOSFETs perform better than inversion MOSFETs in,ultra low power applications. For poly gate CMOS, accumulation MOSFETs perform better than inversion MOSFETs in low standby power applications.
引用
收藏
页码:940 / 947
页数:8
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