Investigation of Sensing Characteristic of Flexible Arrayed RuO2 Chlorine Ion Sensor Modified by Graphene Oxide

被引：1

作者：

Tseng, Shi-Chang ^{[1
]}

Wu, Tong-Yu ^{[1
]}

Chou, Jung-Chuan ^{[2
]}

Liao, Yi-Hung ^{[3
]}

Lai, Chih-Hsien ^{[2
]}

Yan, Siao-Jie ^{[2
]}

Tseng, Ting-Wei ^{[4
]}

机构：

[1] Natl Yunlin Univ Sci & Technol, Grad Sch Mech Engn, Touliu 64002, Taiwan

[2] Natl Yunlin Univ Sci & Technol, Grad Sch Elect Engn, Touliu 64002, Taiwan

[3] TransWorld Univ, Dept Informat & Elect Commerce Management, Touliu, Yunlin 64063, Taiwan

[4] Natl Yunlin Univ Sci & Technol, Dept Elect Engn, Touliu 64002, Yunlin, Taiwan

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2018年 / 31卷 / 02期

关键词：

Ruthenium dioxide; graphene oxide; response time; interference effect; hysteresis effect and drift effect; CARBON;

D O I：

10.1109/TSM.2018.2802486

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, the response time, interfering effect, drift effect, and hysteresis effect were investigated for the flexible arrayed ruthenium dioxide (RuO2)/0.01 wt% graphene oxide (GO) chlorine ion sensor. The best response time was 2 s in 10(-2) M and 1 M NaCl solutions. The KNO3, CaSO4, CaCO3, K2SO4, NaHCO3, and NaI solutions were dropped in 10(-5) M NaCl solution for interference measurement. The experimental results proved that the flexible arrayed RuO2/0.01 wt% GO chlorine ion sensor has good selectivity. The hysteresis potentials of the flexible arrayed RuO2/0.01 wt% GO chlorine ion sensor were 1.548 mV and 1.138 mV in the NaCl solutions during the cycles of 1 M -> 10(-1) M -> 1 M -> 10(-3) M -> 1 M and 1 M -> 10(-3) M -> 1 M -> 10(-1) M -> 1 M, respectively. The drift rate of the flexible arrayed RuO2/0.01 wt% GO chlorine ion sensor was 0.186 mV/hr in 10(-2) M NaCl solution. According the experiment result, the GO was used to modify the RuO2 sensing membrane, and the 0.01 wt% GO increased the sensing film conductivity and could reduce the response time, hysteresis effect and drift effect.

引用

页码：295 / 301

页数：7