High-Q silica microdisk optical resonators with large wedge angles on a silicon chip

被引：17
|
作者：
Li, Guanyu [1 ]
Liu, Pei [1 ]
Jiang, Xiaoshun [1 ,3 ]
Yang, Chao [1 ]
Ma, Jiyang [1 ]
Wu, Hongya [1 ]
Xiao, Min [1 ,2 ]
机构：
[1] Nanjing Univ, Coll Engn & Appl Sci, Natl Lab Solid State Microstruct, Nanjing 210093, Jiangsu, Peoples R China
[2] Univ Arkansas, Dept Phys, Fayetteville, AR 72701 USA
[3] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China
来源：
PHOTONICS RESEARCH | 2015年 / 3卷 / 05期
基金：
中国国家自然科学基金;
关键词：
CAVITY OPTOMECHANICS; MICROCAVITIES; MICRORESONATORS;
D O I：
10.1364/PRJ.3.000279
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-mu m-thick microresonators, we have achieved wedge angles of 59 degrees, 63 degrees, 70 degrees, and 79 degrees with optical quality factors of 2.4 x 10(7), 8.1 x 10(6), 5.9 x 10(6), and 7.4 x 10(6), respectively, from similar to 80 mu m-diameter microresonators in the 1550 nm wavelength band. Also, for 1-mu m-thick microresonators, we have obtained an optical quality factor of 7.3 x 10(6) with a wedge angle of 74 degrees. (C) 2015 Chinese Laser Press
引用
收藏
页码：279 / 282
页数：4
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