Improved Monte Carlo algorithm for the simulation of δ-doped AlInAs/GaInAs HEMT's

被引:87
作者
Mateos, J [1 ]
González, T
Pardo, D
Hoel, V
Happy, H
Cappy, A
机构
[1] Univ Salamanca, Dept Fis Aplicada, E-37008 Salamanca, Spain
[2] Inst Electron & Microelectron Nord, CNRS, UMR 9929, Dept Hyperfraquences & Semicond, F-59652 Villeneuve Dascq, France
关键词
degeneracy; HEMT; Monte Carlo; quantum effects; simulation;
D O I
10.1109/16.817592
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A classical Monte Carlo (MC) device simulation has been modified to locally introduce the effects of electron degeneracy and nonequilibrium screening. Its validity in the case of AlInAs/GaInAs HEMT's has been checked through the comparison, first, with a quantum Schrodinger-Poisson (SP) simulation in the case of a complicated layer structure, which is actually used in the fabrication of real devices, and second, with experimental results of static characteristics of recessed delta-doped HEMT's.
引用
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页码:250 / 253
页数:4
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