Fabrication of transparent conductive AZO (ZnO:Al) film by plasma enhanced chemical vapor deposition

被引：11

作者：

Chen Zhao-Quan ^{[1
]}

Liu Ming-Hai ^{[1
]}

Liu Yu-Ping ^{[1
]}

Chen Wei ^{[1
]}

Luo Zhi-Qing ^{[1
]}

Hu Xi-Wei ^{[1
]}

机构：

[1] Huazhong Univ Sci & Technol, Key Lab Fus & Adv Electromagnet Technol, Minist Educ, Coll Elect & Elect Engn, Wuhan 430074, Peoples R China

来源：

ACTA PHYSICA SINICA | 2009年 / 58卷 / 06期

关键词：

AZO (ZnO:Al); plasma enhanced chemical vapor deposition; transparent conductive film; AL THIN-FILMS;

D O I：

10.7498/aps.58.4260

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

AZO(ZnO:Al) polycrystalline thin films with strong adhesion to the substrate, as low as 89 Omega of sheet electronic resistivity and as high as 79% of visible light transmittance, are fabricated by PECVD (plasma enhanced chemical vapor deposition) method on glass and silicon substrate. The AZO film fabricated by PECVD is a useful attempt. The AZO transparent conductive film has the good photovoltaic properties like that of ITO (In2O3 : Sn); moreover, it is cheap, more nontoxic, and more stable in hydrogen plasma environment than ITO. The results obtained are very important to the selection of the technical conditions.

引用

页码：4260 / 4266

页数：7

共 25 条

[11] Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering [J].

Hong, RJ ;

Jiang, X ;

Szyszka, B ;

Sittinger, V ;

Pflug, A .

APPLIED SURFACE SCIENCE, 2003, 207 (1-4) :341-350

[12]

LI XJ, 2007, CHINESE PHYS B, V16, P3108

[13] Measurement of cerebral perfusion with arterial spin labeling: Part 1. Methods [J].

Liu, Thomas T. ;

Brown, Gregory G. .

JOURNAL OF THE INTERNATIONAL NEUROPSYCHOLOGICAL SOCIETY, 2007, 13 (03) :517-525

[14]

Lu Jian-guo, 2002, Journal of Functional Materials and Devices, V8, P303

[15] Study on preparation and properties of ZnO nano-bulk materials [J].

Qin, XJ ;

Shao, GH ;

Liu, RP ;

Wang, WK .

ACTA PHYSICA SINICA, 2005, 54 (05) :2409-2413

[16]

RECH B, 1997, 26 IEEE PHOT SPEC C, P619

[17]

RUHI K, 2002, TURK J PHYS, V26, P363

[18]

STEVEN SH, 1997, 26 PVSC, P603

[19] Room-temperature optical properties of Al-doped ZnO nanowire array [J].

Tang, Bin ;

Deng, Hong ;

Shui, Zheng-Wei ;

Wei, Min ;

Chen, Jin-Ju ;

Hao, Xin .

ACTA PHYSICA SINICA, 2007, 56 (09) :5176-5179

[20]

TIAN MB, 1991, THIN FILM SCI TECHNI, P601

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