A novel approach for determining pull-in voltages in micro-electro-mechanical systems (MEMS)

被引：0

作者：

Long, DS ^{[1
]}

Shannon, MA ^{[1
]}

Aluru, NR ^{[1
]}

机构：

[1] Univ Illinois, Dept Mech Engn, Urbana, IL 61801 USA

来源：

2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年

关键词：

MEMS; Lagrange Multiplier Method; pull-in voltage; two-dimensional electrostatic analysis;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The sign of the lagrange multiplier will be the criterion used to identify when the conductors come into contact. The validity of this numerical approach is demonstrated by two simple examples along with comparison to previously published data.

引用

页码：481 / 484

页数：4

共 7 条

[1] An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures
Aluru, NR
White, J
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1997, 58 (01) : 1 - 11
[2] BATHE KJ, 1996, FINITE ELEMENT PROCE
[3] CAI X, 1993, RELAXATION MULTIPOLE
[4] M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
Osterberg, PM
Senturia, SD
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1997, 6 (02) : 107 - 118
[5] CAD challenges for microsensors, microactuators, and microsystems
Senturia, SD
[J]. PROCEEDINGS OF THE IEEE, 1998, 86 (08) : 1611 - 1626
[6] SIMULATION METHODS FOR MICROELECTROMECHANICAL STRUCTURES (MEMS) WITH APPLICATION TO A MICROTWEEZER
SHI, F
RAMESH, P
MUKHERJEE, S
[J]. COMPUTERS & STRUCTURES, 1995, 56 (05) : 769 - 783
[7] TRUESDELL C, 1960, HDB PHYS, V3, P243

← 1 →