Electronic structures of high-k transition metal silicates:: first-principles calculations

被引:5
作者
Samantaray, CB [1 ]
Sim, H [1 ]
Hwang, H [1 ]
机构
[1] Kwangju Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju 500712, South Korea
关键词
TM silicates; high-k; ab-initio calculation; band gap; density of states (DOS);
D O I
10.1016/j.mejo.2004.04.006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The energy band gaps and total density of states of different transitional metal (Sc, Zr) silicates have been studied using density functional theory and local density approximation. The problem of a decreasing band gap in Zr silicate predicts the band offset reduction from the introduction of 4d state below the conduction band edge. While, in case of Sc silicate, there is no such decrease in the band gap and it becomes more suitable for the device performances. (C) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码:655 / 658
页数:4
相关论文
共 22 条
  • [1] *ACC INC, 2001, MAT STUD CASTEP
  • [2] Structure and stability of ultrathin zirconium oxide layers on Si(001)
    Copel, M
    Gribelyuk, M
    Gusev, E
    [J]. APPLIED PHYSICS LETTERS, 2000, 76 (04) : 436 - 438
  • [3] Ultrathin high-K metal oxides on silicon: processing, characterization and integration issues
    Gusev, EP
    Cartier, E
    Buchanan, DA
    Gribelyuk, M
    Copel, M
    Okorn-Schmidt, H
    D'Emic, C
    [J]. MICROELECTRONIC ENGINEERING, 2001, 59 (1-4) : 341 - 349
  • [4] Electronic structure analysis of Zr silicate and Hf silicate films by using spatially resolved valence electron energy-loss spectroscopy
    Ikarashi, N
    Manabe, K
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 94 (01) : 480 - 486
  • [5] Tight-binding model and electronic structure of tetrahedral zirconium silicate
    Jameson, JR
    Harrison, W
    Griffin, PB
    [J]. JOURNAL OF APPLIED PHYSICS, 2001, 90 (09) : 4570 - 4577
  • [6] First principles investigation of scaling trends of zirconium silicate interface band offsets
    Kawamoto, A
    Cho, K
    Griffin, P
    Dutton, R
    [J]. JOURNAL OF APPLIED PHYSICS, 2001, 90 (03) : 1333 - 1341
  • [7] Atomic scale effects of zirconium and hafnium incorporation at a model silicon/silicate interface by first principles calculations
    Kawamoto, A
    Jameson, J
    Griffin, P
    Cho, KJ
    Dutton, R
    [J]. IEEE ELECTRON DEVICE LETTERS, 2001, 22 (01) : 14 - 16
  • [8] High ε gate dielectrics Gd2O3 and Y2O3 for silicon
    Kwo, J
    Hong, M
    Kortan, AR
    Queeney, KT
    Chabal, YJ
    Mannaerts, JP
    Boone, T
    Krajewski, JJ
    Sergent, AM
    Rosamilia, JM
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (01) : 130 - 132
  • [9] Dielectric functions and optical bandgaps of high-K dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry
    Lim, SG
    Kriventsov, S
    Jackson, TN
    Haeni, JH
    Schlom, DG
    Balbashov, AM
    Uecker, R
    Reiche, P
    Freeouf, JL
    Lucovsky, G
    [J]. JOURNAL OF APPLIED PHYSICS, 2002, 91 (07) : 4500 - 4505
  • [10] Electronic structure of transition metal/rare earth alternative high-K gate dielectrics: interfacial band alignments and intrinsic defects
    Lucovsky, G
    [J]. MICROELECTRONICS RELIABILITY, 2003, 43 (9-11) : 1417 - 1426