Ion beam induced chemical vapor deposition (IBICVD) of cobalt particles

被引：17
作者：
Lapicki, A [1 ]
Ahmad, E [1 ]
Suzuki, T [1 ]
机构：
[1] Toyota Technol Inst, ISML, Tempaku Ku, Nagoya, Aichi 46818511, Japan
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2002年 / 240卷 / 1-3期
关键词：
cobalt; carbonyl; deposition; IBICVD; micromagnetic structures; pattern formation;
D O I：
10.1016/S0304-8853(01)00725-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A novel method aiming at fabricating submicron-scale particles utilizing dicobalt octacarbonyl as a precursor for cobalt, formed upon localized ion beam induced decomposition, is presented. Patterns of deposited particles are fabricated through vector scan rastering. Measurements of cumulative magnetic properties (arrays of 2 mum-size dots) show coercivity of about 100 Oe and the saturation magnetization of approximately 1000 emu/cm(3). (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：47 / 49
页数：3
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