Microstructured silicon anodes for lithium-ion batteries

被引:19
作者
Li, G. V. [1 ]
Astrova, E. V. [1 ]
Rumyantsev, A. M. [1 ]
Voronkov, V. B. [1 ]
Parfen'eva, A. V. [1 ]
Tolmachev, V. A. [1 ]
Kulova, T. L. [2 ]
Skundin, A. M. [2 ]
机构
[1] Russian Acad Sci, AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia
[2] Russian Acad Sci, Frumkin Inst Phys Chem & Electrochem, Moscow 119071, Russia
基金
俄罗斯基础研究基金会;
关键词
anodes of lithium-ion batteries; porous silicon; electrochemical etching; micro- and nanostructures; MACROPOROUS SILICON; NEGATIVE ELECTRODES;
D O I
10.1134/S1023193515100080
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Scientific and methodical fundamentals are developed for the technology of manufacturing of microstructured Si anodes based on macroporous silicon. The main technological processes include the electrochemical etching of single-crystal silicon wafers that allows obtaining an ordered lattice of cylindrical macropores with a cavity between the porous layer and support, anisotropic shaping, formation of a copper contact, and separation of the silicon structure from the support. Microstructures are manufactured in the form of a grid, columns, and zigzags with thin monodispersed walls of different crystallographic orientation. The possibility of repeated use of the Si support for anodic treatment and the manufacturing of several anodic structures from a single plate Si wafer is shown. The performed electrochemical tests demonstrate that the anodes manufactured according to the developed technology sustain hundreds of charge-discharge cycles.
引用
收藏
页码:899 / 907
页数:9
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