Mushroom microlenses: Optimized microlenses by reflow of multiple layers of photoresist

被引：48

作者：

Heremans, P ^{[1
]}

Genoe, J ^{[1
]}

Kuijk, M ^{[1
]}

Vounckx, R ^{[1
]}

Borghs, G ^{[1
]}

机构：

[1] VUB,ETRO,B-1050 BRUSSELS,BELGIUM

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1997年 / 9卷 / 10期

关键词：

lenses; light-emitting diodes; resists;

D O I：

10.1109/68.623265

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel type of photoresist microlenses is conceived. The characteristic of these lenses is their mushroom shape: the lens dome is located at a certain controllable distance from the substrate, and the curvature of the lens is larger than that of traditional truncated-sphere lenses. These mushroom microlenses are equilibrium-state, stable products of reflow that are obtained when starting from a multilayer photoresist stack. Integration on light-emitting diodes results in enhanced output efficiency and directivity: a vertical-to-surface emission enhancement of up to a factor of 8 has been achieved.

引用

页码：1367 / 1369

页数：3