Hydrothermally treated sol solution of tin oxide for thin-film gas sensor

被引：163
作者：
Baik, NS
Sakai, G [1 ]
Miura, N
Yamazoe, N
机构：
[1] Kyushu Univ, Grad Sch Engn Sci, Dept Mol & Mat Sci, Kasuga, Fukuoka 8168580, Japan
[2] Kyushu Univ, Adv Sci & Technol Ctr Cooperat Res, Kasuga, Fukuoka 8168580, Japan
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 63卷 / 1-2期
关键词：
tin oxide; nanometer-sized particles; sol; thin-film; hydrothermal treatment;
D O I：
10.1016/S0925-4005(99)00513-4
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A sol solution containing SnO2 particles (crystallites) of 6 nm in average diameter was prepared by a hydrothermal treatment. The hydrothermal treatment was found to be very effective for suppressing the thermal growth of SnO2 grains. A thin-film sensor device, fabricated by spin-coating from the sol solution, consisted of SnO2 crystallites with 6 nm in mean diameter after calcination at 600 degrees C. The device proved for better properties in sensitivity and response transient than a conventional sintered-block sensor device using SnO2 precipitated gel. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：74 / 79
页数：6
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