Effects of sol-gel processing parameters and substrates on crystallization of potassium tantalate-niobate thin films

被引:0
|
作者
Bao, DH [1 ]
Kuang, AX [1 ]
Gu, HS [1 ]
机构
[1] HUBEI UNIV, INST PIEZOELECT CERAM TECHNOL, WUHAN 430062, PEOPLES R CHINA
来源
关键词
D O I
10.1002/1521-396X(199709)163:1<67::AID-PSSA67>3.0.CO;2-O
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Potassium tantalate-niobate thin films were prepared from metal-organic compounds by sol-gel processing. Effects of substrates and processing parameters on K(Ta, Nb)O-3 thin film growth were studied. The results slowed that perovskite phase of K(Ta, Nb)O-3 was formed through the reactions of pyrochlore phases, and K(Ta, Nb)O-3 thin films with pure perovskite phase can be obtained. The formation mechanism of the perovskite phase of K(Ta, Nb)O-3 on SrTiO3 and MgO single crystal substrates was discussed, and the causes that K(Ta, Nb)O-3 thin films with pure perovskite structure on single crystal silicon and quartz glass substrates cannot be obtained was detailed.
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页码:67 / 72
页数:6
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