Multi-objective optimization design and performance evaluation of a novel flexure-based tri-axial servo cutting system

Micro/nano structured surfaces with sophisticated geometric dimensions and shapes have broad application prospects in energy, optics and other aspects. However, the flexible manufacturing with low cost is still a challenge. In this study, a novel flexure-based tri-axial servo cutting system (FTSCS) was developed for micro/ nano manufacturing considering the tool position and posture modulation ability. An X-type compliant mech-anism is designed based on trapezoidal leaf spring, right circular flexure hinge and leaf spring. The FEA-based multi-objective optimization was conducted to determine the structural dimension parameters of the X-type compliant mechanism. In addition, the analytical model of compliance is established and the dynamic perfor-mance is tested. The static and the dynamic results have good agreement with the results of FEA. Meanwhile, the kinematic performance was analyzed to investigate the modulation flexibility and stability. Finally, the hierar-chical micro-grooves and micro-pillars were fabricated on the end surface of 6061 Al round rod by the prototype to validate the feasibility of the proposed FTSCS. The wettability of the workpiece surface was measured before and after manufacturing. The measurement results show that the hydrophilic characteristic before manufacturing transform to hydrophobic characteristic due to the exist of micro-grooves.