Investigation of Electrophysical Properties of ITO Films

被引：3
|
作者：
Zhidik, Yu. S. [1 ,2 ]
Troyan, P. E. [1 ]
Kozik, V. V. [3 ]
Kozyukhin, S. A. [3 ,4 ]
Zabolotskaya, A. V. [3 ]
Kuznetsova, S. A. [3 ]
机构：
[1] Tomsk State Univ Control Syst & Radioelect, Tomsk, Russia
[2] Russian Acad Sci, Siberian Branch, VE Zuev Inst Atmospher Opt, Tomsk, Russia
[3] Natl Res Tomsk State Univ, Tomsk, Russia
[4] Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, Moscow, Russia
来源：
RUSSIAN PHYSICS JOURNAL | 2020年 / 63卷 / 07期
基金：
俄罗斯基础研究基金会;
关键词：
ITO films; electrical conductivity; resistance; charge carrier mobility; charge carrier concentration;
D O I：
10.1007/s11182-020-02167-4
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The results of a study of the electrophysical characteristics of ITO films obtained by magnetron sputtering are presented. It is shown that a significant increase in the electrical conductivity of ITO films is facilitated by high-temperature annealing due to two processes. First, the high-temperature treatment of ITO films after their synthesis promotes the formation of a crystal structure, which leads to an increase in the mobility of charge carriers. Second, as a result of high-temperature annealing, the impurity in ITO films becomes completely electrically active, which leads to an increase in the concentration of conduction electrons and a change of the semiconductor mechanism of electrical conductivity to the metallic one.
引用
收藏
页码：1139 / 1143
页数：5
相关论文
共 50 条
  • [41] Study on transmittance spectra of ITO thin films by ellipsometric method
    ZhaoQi Sun
    ChunBin Cao
    Qi Cai
    XuePing Song
    Science China Technological Sciences, 2010, 53 : 1893 - 1896
  • [42] Study on transmittance spectra of ITO thin films by ellipsometric method
    Sun ZhaoQi
    Cao ChunBin
    Cai Qi
    Song XuePing
    SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2010, 53 (07) : 1893 - 1896
  • [43] Study on transmittance spectra of ITO thin films by ellipsometric method
    SUN ZhaoQi1
    2 School of Sciences
    3 Key Laboratory of Opto-electronic Information Acquisition and Manipulation
    Science China(Technological Sciences), 2010, (07) : 1893 - 1896
  • [44] Ultrathin continuous undoped diamond films: Investigation of nanoscale conduction properties
    Ternyak, O
    Cimmino, AA
    Prawer, S
    Hoffman, A
    DIAMOND AND RELATED MATERIALS, 2005, 14 (3-7) : 272 - 278
  • [45] Electrophysical Properties of Epoxy Composite Materials Filled with Carbon Black Nanopowder
    Buketov, Andriy
    Smetankin, Serhii
    Lysenkov, Eduard
    Yurenin, Kyrylo
    Akimov, Oleksandr
    Yakushchenko, Serhii
    Lysenkova, Iryna
    ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2020, 2020 (2020)
  • [46] Influence of surface layer conditions of multiwall carbon nanotubes on their electrophysical properties
    Romanenko, A. I.
    Anikeeva, O. B.
    Buryakov, T. I.
    Tkachev, E. N.
    Zhdanov, K. R.
    Kuznetsov, V. L.
    Mazov, I. N.
    Usoltseva, A. N.
    Ischenko, A. V.
    DIAMOND AND RELATED MATERIALS, 2010, 19 (7-9) : 964 - 967
  • [47] Tunable electrophysical properties of composites nano-CdS/polyvinyl alcohol
    Rudko, G. Yu.
    Kovalchuk, A. O.
    Bondarenko, V. A.
    Fediv, V. I.
    Gule, E. G.
    MATERIALS CHEMISTRY AND PHYSICS, 2014, 148 (1-2) : 77 - 81
  • [48] The influence of γ-irradiation on electrophysical properties of spinel-based oxide ceramics
    Kovalskiy, AP
    Shpotyuk, OI
    Hadzaman, IV
    Mrooz, OY
    Vakiv, MM
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 166 : 289 - 292
  • [49] Electrophysical Properties and Structure of Natural Disordered sp2 Carbon
    Golubev, Yevgeny A.
    Antonets, Igor, V
    NANOMATERIALS, 2022, 12 (21)
  • [50] Piezoresistive failure behaviors and mechanisms of the ITO thin films at high temperatures
    Liu, Zhichun
    Liang, Junsheng
    Wang, Biling
    Hou, Zhenqi
    Wang, Haigang
    Sun, Hongyi
    Lu, Wenqi
    Li, Qiang
    Zhao, Xin
    Xu, Jun
    Wang, Dazhi
    VACUUM, 2023, 215
12345