Investigation of Electrophysical Properties of ITO Films

被引：3

作者：

Zhidik, Yu. S. ^{[1
,2
]}

Troyan, P. E. ^{[1
]}

Kozik, V. V. ^{[3
]}

Kozyukhin, S. A. ^{[3
,4
]}

Zabolotskaya, A. V. ^{[3
]}

Kuznetsova, S. A. ^{[3
]}

机构：

[1] Tomsk State Univ Control Syst & Radioelect, Tomsk, Russia

[2] Russian Acad Sci, Siberian Branch, VE Zuev Inst Atmospher Opt, Tomsk, Russia

[3] Natl Res Tomsk State Univ, Tomsk, Russia

[4] Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, Moscow, Russia

来源：

RUSSIAN PHYSICS JOURNAL | 2020年 / 63卷 / 07期

基金：

俄罗斯基础研究基金会;

关键词：

ITO films; electrical conductivity; resistance; charge carrier mobility; charge carrier concentration;

D O I：

10.1007/s11182-020-02167-4

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The results of a study of the electrophysical characteristics of ITO films obtained by magnetron sputtering are presented. It is shown that a significant increase in the electrical conductivity of ITO films is facilitated by high-temperature annealing due to two processes. First, the high-temperature treatment of ITO films after their synthesis promotes the formation of a crystal structure, which leads to an increase in the mobility of charge carriers. Second, as a result of high-temperature annealing, the impurity in ITO films becomes completely electrically active, which leads to an increase in the concentration of conduction electrons and a change of the semiconductor mechanism of electrical conductivity to the metallic one.

引用

页码：1139 / 1143

页数：5

共 50 条

[1] Investigation of Electrophysical Properties of ITO Films
Yu. S. Zhidik
P. E. Troyan
V. V. Kozik
S. A. Kozyukhin
A. V. Zabolotskaya
S. A. Kuznetsova
Russian Physics Journal, 2020, 63 : 1139 - 1143
[2] Structial, Electrophysical, and Optical Properties of ITO Films Produced by the Modified CVD Method
Kutlimratov A.
Zufarov M.A.
Kabulov R.R.
Xajiyev M.U.
Applied Solar Energy, 2022, 58 (4) : 497 - 502
[3] Electrical and Optical Properties of ITO/Au/ITO Multilayer Films for High Performance TCO Films
Thonglem, Sutatip
Intatha, Uraiwan
Pengpat, Kamonpan
Rujijanagul, Gobwute
Tunkasiri, Tawee
Eitssayeam, Sukum
FERROELECTRICS, 2013, 457 (01) : 117 - 123
[4] EFFECT OF THE STRUCTURAL FEATURES OF METAL PHTHALOCYANINE FILMS ON THEIR ELECTROPHYSICAL PROPERTIES
Klyamer, D. D.
Basova, T., V
JOURNAL OF STRUCTURAL CHEMISTRY, 2022, 63 (07) : 997 - 1018
[5] EFFECT OF THE STRUCTURAL FEATURES OF METAL PHTHALOCYANINE FILMS ON THEIR ELECTROPHYSICAL PROPERTIES
D. D. Klyamer
T. V. Basova
Journal of Structural Chemistry, 2022, 63 : 997 - 1018
[6] Effect of in layer thickness on the photoelectric properties of indium tin oxide (ITO)/In/ITO multilayer films
Jiao, Peiwen
Li, Sijin
Zhu, Guisheng
Xu, Huarui
Wang, Kunzhe
Zhao, Yunyun
Zhang, Xiuyun
Jiang, Kunpeng
Jiang, Xupeng
Huang, Yujia
THIN SOLID FILMS, 2024, 789
[7] Study on the electrical properties of ITO films deposited by facing target sputter deposition
Kim, Youn J.
Jin, Su B.
Kim, Sung I.
Choi, Yoon S.
Jeon, In S. Choi
Han, Jeon G.
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (07)
[8] Effects of heat treatment on properties of ITO films prepared by rf magnetron sputtering
Hu, YL
Diao, XG
Wang, C
Hao, WC
Wang, TM
VACUUM, 2004, 75 (02) : 183 - 188
[9] Morphology, structure and optical properties of sol-gel ITO thin films
Stoica, TF
Teodorescu, VS
Blanchin, MG
Stoica, TA
Gartner, M
Losurdo, M
Zaharescu, M
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2003, 101 (1-3): : 222 - 226
[10] Experimental and numerical investigation of the electrophysical properties of products of combustion of hydrogen in oxygen seeded with alkali metals
E. P. Velikhov
Yu.G. Degtev
V. P. Panchenko
P. N. Egorushkin
B. G. Tkachenko
E. P. Seleznev
M. I. Goldovskii
V. M. Razin’kina
V. K. Sereda
A. G. Galeev
High Temperature, 2006, 44 : 637 - 646

← 1 2 3 4 5 →