Over 1000 channel nitride-based micro-light-emitting diode arrays with tunnel junctions

We fabricated nitride-based micro-LED arrays with a small number of fabrication process steps by using a combination of tunnel junctions and patterned n-GaN cathode lines. A use of the combination enables us to skip a couple of process steps required in standard LED array fabrication. A 10 x 10 channel matrix-addressable LED array with a 10 x 16 mu m(2) emission regions and a 25 mu m pitch lengths showed uniform operating voltages and light output intensities, indicating good yield due to the small number of process steps used. In addition, microdisplay of over 1000 (14 x 72) channels was successfully demonstrated. The new array structure with the tunnel junction and n-GaN cathode line provides a high density and a high yield simultaneously. (C) 2014 The Japan Society of Applied Physics