Femtosecond pulsed laser direct writing system

被引：32

作者：

Venkatakrishnan, K ^{[1
]}

Tan, B ^{[1
]}

Stanley, P ^{[1
]}

Lim, LEN ^{[1
]}

Ngoi, BKA ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Precis Engn & Nanotechnol Ctr, Singapore 639798, Singapore

来源：

OPTICAL ENGINEERING | 2002年 / 41卷 / 06期

关键词：

laser writing; femtosecond laser; acoustic-optic deflectors;

D O I：

10.1117/1.1476324

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Laser writing using conventional lasers has found widespread application in the fabrication of electronic components and the repair of integrated circuits. However, due to large thermal damage associated with the laser ablation process, these lasers are not suitable for microelectronic components with submicron feature size. To address these issues, a novel system is introduced for laser direct writing using femtosecond lasers. Here, an acousto-optic deflector-based scanning system has been developed for steering the femtosecond laser beam with high positional accuracy, resolution, and scan speed. The capability of the system to machine complex features with submicron line widths has been proved. This system has profound potential application in the electronic and microfabrication industry. (C) 2002 society of Photo-Optical Instrumentation Engineers.

引用

页码：1441 / 1445

页数：5