Structural and optical properties of Bi12SiO20 thin films obtained by pulsed laser deposition

被引:12
作者
Escobar-Alarcón, L
Haro-Poniatowski, E
Fernández-Guasti, M
Perea, A
Afonso, CN
Falcón, T
机构
[1] Inst Nacl Invest Nucl, Dept Fis, Mexico City 11801, DF, Mexico
[2] Univ Autonoma Metropolitana Iztapalapa, Dept Fis, Mexico City 09340, DF, Mexico
[3] CSIC, Inst Opt, E-28006 Madrid, Spain
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷 / Suppl 1期
关键词
D O I
10.1007/s003390051565
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work, the synthesis of Bi12SiO20 thin films by pulsed laser deposition on silicon substrates is reported. The structure of the films has been investigated by Raman spectroscopy and X-ray diffraction. The thicknesses and complex refractive index have been determined by reflectivity measurements performed in situ during the growth process. The surface morphology was investigated by scanning electron microscopy. Highly oriented crystalline thin films were grown for substrate temperatures of 600 degrees C. The thermal annealing at 700 degrees C of the amorphous films deposited at substrate temperatures of 100-300 degrees C led to the formation of the eulytite crystalline phase (Bi-4(SiO4)(3)), whose Raman peaks are also reported.
引用
收藏
页码:S949 / S952
页数:4
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