A novel high-precision measurement method for measuring roll is presented. The pentagonal prism and corner-cube prism are used as splitting element and sensitive element, respectively. A pair of parallel collimated beams generated by a pair of splitting pentagonal prisms is incident upon the target moving along linear guide. Two beams returning from two corner-cube prisms on the target reach two four quadrant photoelectric detectors (QD(1) and QD(2)), respectively. So the roll can be measured by differential measurement based on QD(1) and QD(2). Further, the measurement resolution can be doubled and resistance to common mode interference can be enhanced, by adopting common-path structure based on the polarization splitting prisms. Feasibility of the method is verified by theoretical analysis and experiments. When the system parameters apply to the values supposed, for the roll, the angular resolution can reach to 0.1", and measuring accuracy is about 1". (C) 2015 Elsevier GmbH. All rights reserved.
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Tsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R ChinaTsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R China
Wang, Shengtong
Ma, Rui
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Tsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R ChinaTsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R China
Ma, Rui
Cao, Feifan
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Tsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R ChinaTsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R China
Cao, Feifan
Luo, Linbin
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Tsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R ChinaTsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R China
Luo, Linbin
Li, Xinghui
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Tsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R China
Tsinghua Univ, Tsinghua Berkeley Shenzhen Inst, Shenzhen 518055, Peoples R ChinaTsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R China