A micromachined optical switch with a vertical SU-8 mirror

被引：1

作者：

Liu, SY ^{[1
]}

Bu, MQ ^{[1
]}

Ye, XY ^{[1
]}

Zhou, ZY ^{[1
]}

Zhang, DC ^{[1
]}

Li, T ^{[1
]}

Hao, YL ^{[1
]}

Tan, ZM ^{[1
]}

机构：

[1] Tsinghua Univ, Micro Nano Technol Res Ctr, Beijing 100084, Peoples R China

来源：

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES | 2001年 / 4601卷

关键词：

MEMS; optical switch; surface micromachined; SU-8; vertical mirror;

D O I：

10.1117/12.444734

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper, a novel surface micromachined optical switch with a micro vertical SU-8 mirror is reported. Using stress-induced bending of a polysilicon/silicon nitride bimorph beam, a vertical mirror is raised above the substrate. The beam with the mirror is attracted to the substrate by applying a voltage to switch the transmission state to the reflection state of the optical switch. The mirror displacement is about 250 mum. The roughness of the sidewall of the gold-coated SU-8 mirror is measured to be 53.5 Angstrom for the average roughness (Ra) and 71.3 Angstrom for the root mean square (rms). The verticality of the SU-8 mirror is 89.1degrees. The insertion loss is measured to be 2.9 dB in the transmission state and 4.1dB in the reflection state for multi-mode fibers, The structure of the switch provides us a possibility of expanding to a large matrix of optical switches.

引用

页码：354 / 359

页数：6

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