A Noise Spectroscopy-Based Selective Gas Sensing with MOX Gas Sensors

被引：8

作者：

Gomri, S. ^{[1
]}

Seguin, J. ^{[2
]}

Contaret, T. ^{[2
]}

Fiorido, T. ^{[2
]}

Aguir, K. ^{[2
]}

机构：

[1] Natl Sch Engineers Sfax, Rd Soukra,Km 4-3000, Sfax, Tunisia

[2] Aix Marseille Univ, Univ Toulon, CNRS, IM2NP, Marseille, France

来源：

FLUCTUATION AND NOISE LETTERS | 2018年 / 17卷 / 02期

关键词：

Metal oxide gas micro sensor; adsorption-desorption noise; fluctuation-enhanced sensing; noise spectroscopy; gas sensor selectivity; ADSORPTION-DESORPTION NOISE; CHEMICAL SENSORS; FILM; SPECTRA;

D O I：

10.1142/S0219477518500165

中图分类号：

O1 [数学];

学科分类号：

0701 ; 070101 ;

摘要：

We propose a new method for obtaining a fluctuation-enhanced sensing (FES) signature of a gas using a single metal oxide (MOX) gas micro sensor. Starting from our model of adsorption-desorption (A-D) noise previously developed, we show theoretically that the product of frequency by the power spectrum density (PSD) of the gas sensing layer resistance fluctuations often has a maximum which is characteristic of the gas. This property was experimentally confirmed in the case of the detection of NO2 and O-3 using a WO3 sensing layer. This method could be useful for classifying gases. Furthermore, our noise measurements confirm our previous model showing that PSD of the A-Dnoise in MOX gas sensor is a combination of Lorentzians having a low frequency magnitude and a cut-off frequency which depends on the nature of the detected gas.

引用

页数：22

共 32 条

[1] Fluctuation enhanced sensing (FES) with a nanostructured, semiconducting metal oxide film for gas detection and classification [J].

Ayhan, Bulent ;

Kwan, Chiman ;

Zhou, Jin ;

Kish, Laszlo B. ;

Benkstein, Kurt D. ;

Rogers, Phillip H. ;

Semancik, Steve .

SENSORS AND ACTUATORS B-CHEMICAL, 2013, 188 :651-660

[2] Conduction model of metal oxide gas sensors [J].

Barsan, N ;

Weimar, U .

JOURNAL OF ELECTROCERAMICS, 2001, 7 (03) :143-167

[3] Van der Waals radii of elements [J].

Batsanov, SS .

INORGANIC MATERIALS, 2001, 37 (09) :871-885

[4] GAS AND VAPOR EFFECTS ON THE RESISTANCE FLUCTUATION SPECTRA OF CONDUCTING POLYMER THIN-FILM RESISTORS [J].

BRUSCHI, P ;

CACIALLI, F ;

NANNINI, A ;

NERI, B .

SENSORS AND ACTUATORS B-CHEMICAL, 1994, 19 (1-3) :421-425

[5] Adsorption-desorption noise in micromechanical resonant structures [J].

Djuric, Z ;

Jaksic, O ;

Randjelovic, D .

SENSORS AND ACTUATORS A-PHYSICAL, 2002, 96 (2-3) :244-251

[6] Monte Carlo studies of effects of substrate size on water-substrate interaction energy and wafer structure [J].

Fang, JX ;

Marlow, WH ;

Lu, JX ;

Lucchese, RR .

JOURNAL OF CHEMICAL PHYSICS, 1997, 107 (13) :5212-5216

[7]

Gasparyan F., 2014, J MOD PHYS, V5, P1662

[8] Adsorption-desorption noise in gas sensors: Modelling using Langmuir and Wolkenstein models for adsorption [J].

Gomri, S ;

Seguin, JL ;

Guerin, J ;

Aguir, K .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 114 (01) :451-459

[9] Modeling on oxygen chemisorption-induced noise in metallic oxide gas sensors [J].

Gomri, S ;

Seguin, JL ;

Aguir, K .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 107 (02) :722-729

[10] Noise Modeling in MOX Gas Sensors [J].

Gomri, S. ;

Contaret, T. ;

Seguin, J. ;

Aguir, K. ;

Masmoudi, M. .

FLUCTUATION AND NOISE LETTERS, 2017, 16 (02)

← 1 2 3 4 →